ECE 658 - Winter 2006 - Tentative Syllabus

 

 

NO.

 

Text

 

 

 

G = Gardner

 

 

 

S = Senturia

 

 

 

 

 

 

Introduction

S1

pdf

A

Micromechanical Devices

 

 

 

Overview of Microfabrication Techniques

S3

pdf

 

Process Integration: Case Studies

S4

pdf

 

Overview of Lumped Modeling

S5

pdf

 

Lumped Element System Dynamics

S7

pdf

 

Elasticity

S8

pdf

 

Micromechanical Structures

S9

pdf

 

Case Study: Piezoresistive Pressure Sensor

S18

pdf

 

Case Study: Capacitive Accelerometer

S19

pdf

B

Microfluidic Systems

 

 

 

Introdcution to Fluid Dynamics

S13

pdf

 

Case Study: PCR on a chip

S22

pdf

C

Other Sensors

G8

pdf

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  File   DUE
Homework #1
pdf

Homework #2
pdf

Homework #3
pdf

Homework #4
pdf

Homework #5
pdf

Homework #6
pdf

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ECE 658 - Fabrication and Characterization of MEMS

Information and Policies

 

1. General Information

 

Instructor

 

Prof. Stephane Evoy

Room ECERF W2-085

Phone: 492-5866

Email: evoy@ece.ualberta.ca

Office hours: Mon 1-3 p, Tue 9:30-11:30, Wed 1-3 p

Web: http://www.ece.ualberta.ca/~evoy/ece658/index.html

 

 

 

 

2. Texts

 

Required Text (70 % of lecture material):

"Microsystem Design", 1st edition, S. D. Senturia (Kluwer Boston Inc, Boston, 2000).

 

 

Additional Text: (30 % of Lecture Material)

"Microsensors, MEMS, and Smart Devices",1st edition, J. W. Gardner, V. K. Varadan, and O. O. Awadelkarim, (John Wiley & Sons, New York, 2001).

 

3. Grading:

 

5-6 Homework Assignments:                               30 %             (due Fridays, 4:00 p)

1 Midterm Exam                                                    35 %             (Date TBA)

1 Final Exam                                                    35 %             (Date TBA)

 

4. Important Policies

 

·        The Homework Assignments are expected to be independent work. Plagiarism and/or “carbon copies” will not be tolerated, will result in a grade of zero for that HW, and will be reported to upper authorities.

·        Lateness penalty for homeworks:  20 % off of score (at 4:01 pm) + 0.3 % per additional hour (nights and week-ends included).

·        Lateness due to sickness or other major issues should be noted to Dr. Evoy by *email* prior to the HW deadline. Medical or other signed note will then be expected afterwards.

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Last modified: 17 Dec 2007