Class RationaleThe development of silicon integrated circuits has launched a technological revolution that has affected almost every aspect of our lives. While phenomenal, such progress has however been limited for the most part to the integration of information processing functionalities. Microelectromechanical systems aim to expand upon the silicon revolution by creating a new class of devices that also integrate sensing, communication, and actuation functionalities into single chip systems. Such integration enables the development of smart products that augment the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators. Since these systems are manufactured using batch fabrication techniques similar to those used for integrated circuits, unprecedented levels of functionality and sophistication can be inetgrated on a small chip at a relatively low cost.
Instructor: Prof. Stephane Evoy
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Title slide micrographs credits: Left, center-bottom, and right : Sandia National Labs Center-top: Lucent Technologies Last modified: 17 Dec 2007 |