Murat Gel 
Postdoctoral Fellow, Department of Electrical and Computer  Engineering / National Institute for Nanotechnology , University of Alberta  since June 2005

Research Scientist,
University of Tokyo, Institute of Industrial Science, Fujita Laboratory, Oct. 2003 - May 2005

Ph.D., University of Tokyo , Department of Mechano-Informatics,   Shimoyama  Laboratory, Tokyo, Japan, Oct. 2003

M.Sc.,  University of Tokyo , Department of Mechano-Informatics, Tokyo, Japan, Oct. 2000

Research:
Microcantilevers 

Piezoresistive selfsensing cantilever design and fabrication

Fabricated 300 nm thick force sensing cantilevers

Operation in physilogical environment for force measurement of biomolecules

Detection of forces in sub-nanonewton regime.

 



Controllable Nanogap Electrodes 

Sub nanometer resolution  gap control with MEMS actuators

Click here for sample data during conductance quantization between tips

Click here for interesting current behaviour when tips are coated with benzene dithiol

Operation in TEM while observing the gap (controllable gap range 1nm - 40nm)

Charge transport measurement of  self assembled monolayers between gold tips





    
Surface Functionalization for Cantilever Biosensors  

Bacterial detection with MEMS is possible but are the receptors on the surface selective enough to detect a specific bacterial strain ?

Current work: Integration of highly selective bioreceptors on microfabricated biosensor surfaces












Skills:

Microfabrication
Pattern Transfer: Photo Lithography, Electron Beam Lithography for direct writing and mask fabrication (ZEP, PMMA, SAL), click here for SEM pictures
Nanofabrication: AFM lithography (by anodic oxidation of metal and silicon) click here for SEM pictures, Focused Ion Beam machining (Ga source)
Etching:  Reactive Ion Etching of Silicon by ICP-RIE (Alcatel, STS), anisotropic etching of silicon by KOH and TMAH, Deep
Deposition: Sputtering, thermal/electron beam evaporation, LPCVD, thermal oxidation
Ion implantation: Phosphorus, Boron (solid source), Argon,
Electroplating: Cu, Au

Characterization
AFM, SEM, Fluorescence Microscopy, Ellipsometry, FTIR,
Electrical characterization by probe station and semiconductor parameter analyzer, noise measurement, resonance characterization of microstructures by laser doppler vibrometer, familiarity with TEM observation and EDS analysis.

Surface Chemistry/Biofunctionalization
Self-assembled monolayer deposition on gold and silicon surface to introduce funtional groups
Experienced in Aminopropyl triethoxysilane, Octadecyl trichlorosilane, Hexadecanethiol
Protein immobilization click here for pictures

Design and Simulation-
Mechanical simulation of micro structures by ANSYS and Intellisuite, Mask Layout Design by L-EDIT

Clean Room Maintenance-
Maintenance of micro fabrication equipments (ion implanter, mask aligner, Electron beam evaporator).

Computer
Working knowledge of DOS, UNIX, Windows operating systems, C programming language, Mathematica.
Serial port/GPIB communication programming between measurement equipments and computer.

Publications:
PhD Dissertation: Piezoresistive Force Sensing Probes for Biophysical Manipulation　
(Advisor: Isao Shimoyama)

-Refereed Journals-
[1] Gel M, Ishida T, Akasaka T, Umeno A, Araki K, Hirakawa K, Fujita H,
"Mechanically Controlled Quantum Contact with On-chip MEMS Actuator," Journal of Microelectromechanical Sytems (2006-in press)
[2] Onoe H, Gel M, Hoshino K, Matsumoto K, Shimoyama I,
"Direct measurement of the binding force between micro-fabricated particles and a substrate in aqueous solution by force-sensing piezoresistive
cantilevers," 21, (24) Langmuir (2005),11251-11261
[3] Gel M, Shimoyama I,
"Force sensing submicrometer thick cantilevers with ultra-thin piezo resistors by rapid thermal diffusion," Journal of Micromechanics and Micro
Engineering,14, (2004), 423-428.
[4] Gel M, Takeuchi S, Shimoyama I,
"Fabrication method for out-of-plane, micro-coil by surface micromachining," Sensors and Actuators A-Physical, 97-8, (2002), 702-708.
[5] Gel M, Shimoyama I,
"Parallel-plate electrostatic actuation with vertical hinges," Journal of Micromechanics and Microengineering, 11-5, (2001), 555-560.


-Conference Proceedings-
[1] Gel M, Edura T, Wada Y, Fujita H,
Controllable Nano-gap Mechanism for Characterization of Nanoscale Objects, in proceedings of
micro TAS 2005, Boston, pp 739-741.
[2] Gel M, Ishida S, Iwamoto S, Arakawa Y, Fujita H,
Nano Contact Formation in a Simple MEMS Device for The conductance measurements of Nano Objects,
in proceedings of MEMS 2005, Miami, pp 431-434.
[3] Onoe H, Gel M, Hoshino K, Matsumoto K, Shimoyama I,
Binding Force Measurement between Micro Scale Flat Surfaces in Aqueous Environment by Force-Sensing
Piezoresistive Micro-Cantilevers, in Proceedings of MEMS 2005, Miami, pp 16-19.
[4] Gel M, Shimoyama I,
Sub-Micron thick high sensitive piezoresistive cantilevers by boron etch stop and Argon implantation,
in Proceedings of MEMS 2003, Kyoto, pp. 494-497.
[5] Gel M, Hoshino K, Shimoyama I,
Optical displacement detection method with on-chip photodiode for high aspect ratio actuating structures,
in Proceedings of MOEMS 2001, Okinawa, pp. 103-104.
[6] Gel M, Takeuchi S, Shimoyama I,
Fabrication method for out-of-plane, micro-coil by surface micromachining, in Proceedings of TRANSDUCERS 2001,
Munich, pp. 1602-1605.
[7] Gel M, Shimoyama I,
High aspect ratio micro actuation mechanism, in Proceedings of MEMS 2001, Interlaken, pp. 582-585.

 Contact Information:


Murat Gel
Dept. of Electrical and Computer Engineering
National Institute for Nanotechnology
W1-019A ECERF Bldng. (9107 - 116th St.)
University of Alberta
Edmonton, Alberta, Canada T6G 2V4
e-mail: gel at ece dot ualberta dot ca
Fax: (780) 492-1811
Tel: 780-492-5874 (office)  780-492-1929 (lab)


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